Equipment Introduction ：

The Ceramic Substrate Defect Inspection Machine is mainly used for detecting appearance defects on ceramic substrates. This inspection machine employs a high-precision line scan camera; for ultra-high-precision inspection, it utilizes a high-precision line scan laser profiler to perform 3D scans of the substrate surface. It is paired with HiTel’s vision algorithm specifically developed for ceramic substrate materials to conduct in-depth analysis of 2D imaging, 3D point clouds, and depth maps. This enables efficient and accurate detection of defects such as concavity, convexity, scratches, breakage, and spots on the substrate surface, achieving industry-leading levels in both detection rate and detection accuracy.

Core Parameters ：

 •  Maximum Repeatability Accuracy: 3µm;

 • Maximum Inspection Speed: 200mm/s; Line Length: 6mm-500mm;

 • Line Length: 6mm-500mm;

 • Capacity: N360PCS/H;

 • Inspection Items: Pits/Protrusions/Stains/Defects/Warping/Scratches.

应用拓展：

Copper-Clad Ceramic Substrate Inspection (referring to special process boards where copper foil is directly bonded to the surface of ceramic substrates under high temperature),

IGBT Front-End Production Inspection, SiC Substrate Inspection.